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1

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Shot noise, LER, and quantum efficiency of EUV photoresists

Brainard, Robert L., Trefonas, Peter, Lammers, Jeroen H., Cutler, Charlotte A., Mackevich, Joseph F., Trefonas, Alexander, Robertson, Stewart A., Mackay, R. Scott

Année:

2004

Langue:

english

Fichier:

PDF, 557 KB

english, 2004

2

Bottom-up/top-down, high-resolution, high-throughput lithography using vertically assembled block bottle brush polymers

Trefonas, Peter, Thackeray, James W., Sun, Guorong, Cho, Sangho, Clark, Corrie, Verkhoturov, Stanislav V., Eller, Michael J., Li, Ang, Pavia-Sanders, Adriana, Schweikert, Emile A., Wooley, Karen L.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2013

Langue:

english

Fichier:

PDF, 8.66 MB

english, 2013

3

Advanced photoresist technologies by intricate molecular brush architectures: Diblock brush terpolymer-based positive-tone photoresist materials

Sun, Guorong, Cho, Sangho, Yang, Fan, He, Xun, Pavía-Sanders, Adriana, Clark, Corrie, Raymond, Jeffery E., Verkhoturov, Stanislav V., Schweikert, Emile A., Thackeray, James W., Trefonas, Peter, Wooley

Journal:

Journal of Polymer Science Part A: Polymer Chemistry

Année:

2015

Langue:

english

Fichier:

PDF, 807 KB

english, 2015

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Advances in Resist Materials and Processing Technology XXIX - Blob defect prevention in 193nm topcoat-free immersion lithography

Wang, Deyan, Liu, Jinrong, Kang, Doris, Liu, Cong, Estelle, Tom, Xu, Cheng-Bai, Barclay, George, Trefonas, Peter, Somervell, Mark H., Wallow, Thomas I.

Année:

2012

Langue:

english

Fichier:

PDF, 1003 KB

english, 2012

5

The optical and electrical properties of silver nanowire mesh films

Khanarian, G., Joo, J., Liu, X.-Q., Eastman, P., Werner, D., O'Connell, K., Trefonas, P.

Journal:

Journal of Applied Physics

Année:

2013

Langue:

english

Fichier:

PDF, 2.27 MB

english, 2013

6

Polysilane high polymers: mechanism of photodegradation

Trefonas, Peter, West, Robert, Miller, Robert D.

Journal:

Journal of the American Chemical Society

Année:

1985

Langue:

english

Fichier:

PDF, 815 KB

english, 1985

7

Resist effects at small pitches

D. Van Steenwinckel, J. H. Lammers, T. Koehler, R. L. Brainard, P. Trefonas

Année:

2006

Langue:

english

Fichier:

PDF, 497 KB

english, 2006

8

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Alternative Lithographic Technologies VII - Graphoepitaxial and chemoepitaxial methods for creating line-space patterns at 33nm pitch: comparison to a HVM process

Resnick, Douglas J., Bencher, Christopher, Millward, Dan B., Lugani, Gurpreet S., Light, Scott L., Niroomand, Ardavan, Hustad, Phillip D., Trefonas, Peter, Quach, Dung, Ginzburg, Valeriy V.

Année:

2015

Langue:

english

Fichier:

PDF, 686 KB

english, 2015

9

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Advances in Resist Technology and Processing XII - Profile defects in novolac/DNQ resists: I. formation of microgrooves

Trefonas III, Peter, Mirth, George P., Monaghan, Michael J., Turci, Pamela, DeJordy, L., Meister, Catherine C., Allen, Robert D.

Année:

1995

Langue:

english

Fichier:

PDF, 1.09 MB

english, 1995

10

SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Advances in Resist Technology and Processing IX - Acid diffusion, standing waves, and information theory: a molecular-scale model of chemically amplified resist

Trefonas III, Peter, Allen, Mary T., Novembre, Anthony E.

Année:

1992

Langue:

english

Fichier:

PDF, 1.12 MB

english, 1992

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Advances in Resist Materials and Processing Technology XXVI - Materials for single-etch double patterning process: surface curing agent and thermal cure resist

Bae, Young C., Henderson, Clifford L., Liu, Yi, Cardolaccia, Thomas, McDermott, John C., Trefonas, Peter, Spizuoco, Ken, Reilly, Michael, Pikon, Amandine, Joesten, Lori, Zhang, Gary G., Barclay, Georg

Année:

2009

Langue:

english

Fichier:

PDF, 823 KB

english, 2009

12

Design Consideration for Immersion 193: Embedded Barrier Layer and Pattern Collapse Margin

Wang, Deyan, Caporale, Stefan, Audes, Cecily, Cheon, Kap-Soo, Xu, Cheng Bai, Trefonas, Peter, Barclay, George

Journal:

Journal of Photopolymer Science and Technology

Année:

2007

Langue:

english

Fichier:

PDF, 965 KB

english, 2007

13

Designing Block Copolymers for Nanolithography using Mesoscale Modeling: Line-Space Graphoepitaxy

Ginzburg, Valeriy V., Hustad, Phillip D., Millward, Dan B., Trefonas, Peter

Journal:

Année:

2016

Fichier:

PDF, 570 KB

2016

14

Direct Correlation of Single-Particle Motion to Amorphous Microstructural Components of Semicrystalline Poly(ethylene oxide) Electrolytic Films

Roberts, Trevor D., Yuan, Rongfeng, Xiang, Limin, Delor, Milan, Pokhrel, Ravi, Yang, Ke, Aqad, Emad, Marangoni, Tomas, Trefonas, Peter, Xu, Ke, Ginsberg, Naomi S.

Journal:

The Journal of Physical Chemistry Letters

Année:

2020

Fichier:

PDF, 7.82 MB

2020

15

Chemical amplification in submicron lithography: An information theoretic analysis

Charles R. Szmanda, P. Trefonas III

Journal:

Microelectronic Engineering

Année:

1991

Langue:

english

Fichier:

PDF, 521 KB

english, 1991

16

What is the optimum exposure dose for a positive resist containing poly-functional photoactive compound?

Peter Trefonas III, Thomas A. Fisher, Joseph Lachowski

Journal:

Microelectronic Engineering

Année:

1991

Langue:

english

Fichier:

PDF, 451 KB

english, 1991

17

Materials for double patterning strategies: Development and application

D. Perret, J. Simon, S. Gaugiran, C. Cutler, T. Cardolaccia, A. Pikon, I. Guerin, C. Lapeyre, S. Derrough, C. Szmanda, P. Trefonas

Journal:

Microelectronic Engineering

Année:

2009

Langue:

english

Fichier:

PDF, 645 KB

english, 2009

18

Thermal characterization of materials for double patterning

S. Derrough, A. Pikon, C. Sourd, I. Guérin, J. Simon, S. Gaugiran, T. Cardolaccia, Y. Liu, P. Trefonas, G. Barclay, Y.C. Bae

Journal:

Microelectronic Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 521 KB

english, 2010

19

Acid diffusion effects between resists in freezing processes used for contact hole patterning

Jürgen Fuhrmann, André Fiebach, Andreas Erdmann, Peter Trefonas

Journal:

Microelectronic Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 799 KB

english, 2010

20

Magnetic properties and molecular structure of copper(II) complexes of 2,3-pyrazinedicarboxamide

Cheryl L. Klein, Edwin D. Stevens, Charles J. O'Connor, Richard J. Majeste, Louis M. Trefonas

Journal:

Inorganica Chimica Acta

Année:

1983

Langue:

english

Fichier:

PDF, 700 KB

english, 1983

21

An asymmetric synthesis of chiral phthalides via chiral lithiated oxazolines

A.I. Meyers, Mary Ann Hanagan, L.M. Trefonas, R.J. Baker

Journal:

Année:

1983

Langue:

english

Fichier:

PDF, 767 KB

english, 1983

22

Crystal and molecular structure of 9,9-dimethyl-9-azonia-bicyclo [6.1.0] nonane iodide

L.M Trefonas, R Majeste

Journal:

Année:

1963

Langue:

english

Fichier:

PDF, 651 KB

english, 1963

23

Progress toward the total synthesis of maytansine. A stereoselective synthesis of the C-1 to C-7 moiety (northern zone)

A.I. Meyers, C.C. Shaw, Deane Horne, L.M. Trefonas, R.J. Majeste

Journal:

Tetrahedron Letters

Année:

1975

Langue:

english

Fichier:

PDF, 174 KB

english, 1975

24

Polycyclic bases-III The preparation and structure of a novel spirooxazine

Louis M. Trefonas, John Schneller, Albert I. Meyers

Journal:

Tetrahedron Letters

Année:

1961

Langue:

english

Fichier:

PDF, 225 KB

english, 1961

25

Structure and reactions of N,N′-bis(2-isocyanato-2-propyl) diazene (1)

James Akers, Michael F. Dube, Louis M. Trefonas, Jack W. Timberlake, Richard Majeste

Journal:

Tetrahedron Letters

Année:

1978

Langue:

english

Fichier:

PDF, 191 KB

english, 1978

26

Soluble polysilanes: An interesting new class of radiation sensitive materials

R. D. Miller, D. Hofer, G. N. Fickes, C. G. Willson, E. Marinero, P. Trefonas III, R. West

Journal:

Polymer Engineering & Science

Année:

1986

Langue:

english

Fichier:

PDF, 884 KB

english, 1986

27

Organosilane high polymers: Synthesis of formable homopolymers

Peter Trefonas III, Peter I. Djurovich, Xing-Hua Zhang, Robert West, Robert D. Miller, Donald Hofer

Journal:

Journal of Polymer Science Part C: Polymer Letters

Année:

1983

Langue:

english

Fichier:

PDF, 188 KB

english, 1983

28

Organosilane high polymers: Electronic spectra and photodegradation

Peter Trefonas III, Robert West, Robert D. Miller, Don Hofer

Journal:

Journal of Polymer Science Part C: Polymer Letters

Année:

1983

Langue:

english

Fichier:

PDF, 229 KB

english, 1983

29

Organosilane high polymers: Oxidation of polycyclohexylmethylsilylene

Peter Trefonas III, Robert West

Journal:

Journal of Polymer Science Part C: Polymer Letters

Année:

1985

Langue:

english

Fichier:

PDF, 285 KB

english, 1985

30

Organogermane homopolymers and copolymers with organosilane

P. Trefonas, R. West

Journal:

Journal of Polymer Science Part A: Polymer Chemistry

Année:

1985

Langue:

english

Fichier:

PDF, 514 KB

english, 1985

31

Crystal and molecular structure of the 2,4,7-trinitrofluorenone-hexamethylbenzene charge-transfer complex

J. N. Brown, L. D. Cheung, L. M. Trefonas, R. J. Majeste

Journal:

Journal of Chemical Crystallography

Année:

1974

Langue:

english

Fichier:

PDF, 511 KB

english, 1974

32

Crystal and Molecular Structure of Diboron Tetrafluoride, B2F4

Trefonas, Louis, Lipscomb, William N.

Journal:

The Journal of Chemical Physics

Année:

1958

Langue:

english

Fichier:

PDF, 405 KB

english, 1958

33

Crystal and molecular structure of 8,8-dimethyl-8-azoniabicyclo [5.1.0] octane iodide

L. M. Trefonas, Robert Towns

Journal:

Journal of Heterocyclic Chemistry

Année:

1964

Langue:

english

Fichier:

PDF, 330 KB

english, 1964

34

Crystal and molecular structure of 7-(p-lodobenzenesulfonyl)-7-azabicyclo 4.1.0 heptane

L. M. Trefonas, Richard Majeste

Journal:

Journal of Heterocyclic Chemistry

Année:

1965

Langue:

english

Fichier:

PDF, 455 KB

english, 1965

35

Crystal and molecular structure of 6-(p-iodobenzenesulfonyl)-3-oxa-6-azabicyclo[3.1.0]hexane

L. M. Trefonas, Tatsuo Sato

Journal:

Journal of Heterocyclic Chemistry

Année:

1966

Langue:

english

Fichier:

PDF, 388 KB

english, 1966

36

The crystal molecular structure of cis-13,13-dimethyl-13-azoniabicyclo [10.1.0] tridecane iodide

L. M. Trefonas, R. Towns, R. Majeste

Journal:

Journal of Heterocyclic Chemistry

Année:

1967

Langue:

english

Fichier:

PDF, 397 KB

english, 1967

37

Crystal and molecular structure of 6-(p-bromobenzoyl)-6-azabicyclo[3.1.0]hexane

H. M. Zacharis, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1968

Fichier:

PDF, 339 KB

1968

38

The molecular structure of (C1 3 H2 1 N+)Br−

Cass L. Moret, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1968

Fichier:

PDF, 34 KB

1968

39

Crystal and molecular structure of 1-azabicyclo[3.2.0]heptane-1-methyl chloride

Richard Majeste, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1968

Fichier:

PDF, 346 KB

1968

40

Crystal and molecular structure of 1-benzyl-1,2,2-trimethyl azetidinium bromide

C. L. Moret, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1968

Fichier:

PDF, 326 KB

1968

41

The molecular structure of (C14H18P2)+2 2Br−

Richard Majeste, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1969

Langue:

english

Fichier:

PDF, 75 KB

english, 1969

42

Crystal and molecular structure of cis 11-(p-iodobenzenesulfonyl)-11-azabicyclo[8.1.0]undecane

H. Zacharis, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1970

Langue:

english

Fichier:

PDF, 379 KB

english, 1970

43

The crystal and molecular structure of 1,1,4,4-tetraethyl-2,5-dimethyl-1,4-diphosphoniacyclohexadiene-1,4-dibromide

R. L. R. Towns, R. Majeste, J. N. Brown, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1970

Langue:

english

Fichier:

PDF, 323 KB

english, 1970

44

The crystal and molecular structure of 1-(p-iodobenzenesulfonyl)-1-azaspiro[2,5] octane

H. M. Zacharis, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1970

Langue:

english

Fichier:

PDF, 308 KB

english, 1970

45

The crystal and molecular structure of 9-(p-lodophenyl)-9-azatetracyclo[5.3.1.02,6 .08,10] undec-4-ene

J. N. Brown, R. L. R. Towns, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1970

Langue:

english

Fichier:

PDF, 485 KB

english, 1970

46

The stereochemical assignments of the four 8-azaestrone configurational isomers

Richard K. Brown, A. I. Meyers, L. M. Trefonas, R. L. R. Towns, J. N. Brown

Journal:

Journal of Heterocyclic Chemistry

Année:

1971

Fichier:

PDF, 133 KB

1971

47

The crystal and molecular structure of |2-keto-|7-deoxo-8-azacstrone methyl ether hydrohromide

J. N. Brown, R. L. R. Towns, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1971

Fichier:

PDF, 279 KB

1971

48

The crystal and molecular structure of 1,1,4,4-tetraphenyl-1,4-diphosphoniacyclohexane dibromide

J. N. Brown, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1972

Langue:

english

Fichier:

PDF, 340 KB

english, 1972

49

The crystal and molecular structure of 1,1,2,4,4,5-hexaphenyl-1,4-diphosphoniacyclohexadiene-2,5 dibromide

J. N. Brown, L. M. Trefonas

Journal:

Journal of Heterocyclic Chemistry

Année:

1972

Langue:

english

Fichier:

PDF, 343 KB

english, 1972

50

The crystal and molecular structure of 1,1,2,3,3,4,5-heptamethylspiro[4.5]-6,9-diene-1-phosphetanium bromide

J. N. Brown, L. M. Trefonas, R. L. R. Towns

Journal:

Journal of Heterocyclic Chemistry

Année:

1972

Langue:

english

Fichier:

PDF, 107 KB

english, 1972